SECS/GEM Protocol Integration and Data Processing for Real-time SMT Equipment Monitoring

Lai, Keng May (2019) SECS/GEM Protocol Integration and Data Processing for Real-time SMT Equipment Monitoring. Final Year Project (Bachelor), Tunku Abdul Rahman University College.

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Abstract

Semiconductor Equipment Communication Standards/Generic Equipment Model (SECS/GEM) is a communication protocol that is used to provide a communication method between the host and the equipment used in a factory. In this era, SECS/GEM communication protocol is widely used in the manufacturing industry such as in the field of semiconductor, electronics and photovoltaics. Semiconductor Equipment Communication Standard is a part of the standards introduced by an associate named Semiconductor Equipment and Materials International. Generic Equipment Model is relating to the generic model for the behavior of equipment and communication by different message types defined by the Semiconductor Equipment and Material International standards. Implementation of Semiconductor Equipment Communication Standards/Generic Equipment Model interfaces is normally by two common methods which are TCP/IP networking or RS-232 connection. The most common Semiconductor Equipment and Materials International standards in this research will be SEMI E4 and SEMI E5 which are SECS I and SECS II [1]. SECS I is basically referring to the message transfer while SECS II is referring to the message content of the communication [1]. These standards are helpful in a way that it can enable the host and equipment connected with each other, collecting data or transferring data from one point to another. The focus of this work is to understand the development and the application of SECS/GEM communication protocols to the equipment or machines (particularly, the reflow oven) used in the Surface Mounting Technology Industry.