Numerical Analysis of Heat and Flow Profiles in Clean Room Design

Ng, Jian Fei (2021) Numerical Analysis of Heat and Flow Profiles in Clean Room Design. Final Year Project (Bachelor), Tunku Abdul Rahman University College.

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Abstract

In the world that rapid advances in thin-film technology and semiconductor, gigantic growth in microelectronics, narrowing of physical geometry of electronic components and heighten density of components on a single chip during last two decades had given hard challenges to clean-room designers and contamination mapping technologies. The research objective of this study are to investigate the airflow patterns within the space in the minienvironment and to determine the sizes of the supply air inlet and exit air outlet that generate optimum temperature and pressure within a minienvironment. A minienvironment has the function of efficient monitoring of particle concentration, either by maintaining the desired differential pressure or by providing unidirectional airflows required to maintain clean area levels. Some mini-environments provide various devices and physical configurations to actively or passively direct air from and to the mini-environments from the surrounding cleanroom. As a solution, the minienvironment design is used in order to control the heat flow and airflow profile in cleanroom. With ANSYS, simulation of heat and flow profile in different minienvironment design are applied in this research. The results showed when comparing with different size of supply air inlet, exit air outlet and different size of minienvironment, the size of supply air inlet-1.17m x 1.26m, exit air oulet-1.85m x 2.75m and size of minienvironment-3.9m (L) x 10m (D) x 4.2m is most suitable to use when comparing to other sizes. As a conclusion, when the combination of compatible size in the minienvironment is done, it having the best pressure difference which is 10.0120 and it is the closest to 10 Pa when compared to different size of supply air inlet, exit air outlet and size of minienvironment.